Vapour Phase Epitaxy

Vapour Phase Epitaxy
microel. VPE

Универсальный русско-немецкий словарь. . 2011.

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  • Metalorganic vapour phase epitaxy — (MOVPE), also known as organometallic vapour phase epitaxy (OMVPE) or metalorganic chemical vapour deposition (MOCVD), is a chemical vapour deposition method of epitaxial growth of materials, especially compound semiconductors from the surface… …   Wikipedia

  • Hydride vapour phase epitaxy — or HVPE, is an epitaxial growth technique often employed to produce semiconductors such as GaN, GaAs, InP and their related compounds. Carrier gasses commonly used include Ammonia, Hydrogen and various chlorides …   Wikipedia

  • Hybrid vapour phase epitaxy — (HVPE) is used for high rate crystal growth. For example during Gallium nitride growth, HVPE uses ammonia(NH3), and GaCl2, which is formed by Hydrogen chloride flowing over Gallium melt, as sources with purified N2 as carrier gas. The growth is… …   Wikipedia

  • epitaxy — /ep i tak see/, n., pl. epitaxies. Crystall. epitaxis. * * * ▪ crystallography       the process of growing a crystal of a particular orientation on top of another crystal, where the orientation is determined by the underlying crystal. The… …   Universalium

  • Chemical Vapour Deposition — Unter dem Begriff chemische Gasphasenabscheidung (englisch chemical vapor deposition, CVD) versteht man eine Gruppe von Beschichtungsverfahren, welche unter anderem bei der Herstellung von mikroelektronischen Bauelementen eingesetzt werden.… …   Deutsch Wikipedia

  • Chemical vapour deposition — Unter dem Begriff chemische Gasphasenabscheidung (englisch chemical vapor deposition, CVD) versteht man eine Gruppe von Beschichtungsverfahren, welche unter anderem bei der Herstellung von mikroelektronischen Bauelementen eingesetzt werden.… …   Deutsch Wikipedia

  • crystal — crystallike, adj. /kris tl/, n., adj., v., crystaled, crystaling or (esp. Brit.) crystalled, crystalling. n. 1. a clear, transparent mineral or glass resembling ice. 2. the transparent form of crystallized quartz. 3. Chem., Mineral. a solid body… …   Universalium

  • Crystal — /kris tl/, n. 1. a city in SE Minnesota, near Minneapolis. 25,543. 2. a female given name. * * * I Any solid material whose atoms are arranged in a definite pattern and whose surface regularity reflects its internal symmetry. Each of a crystal s… …   Universalium

  • Compound semiconductor — A compound semiconductor is a semiconductor compound composed of elements from two or more different groups of the periodic table [1]. These semiconductors typically form in groups 13 16 (old groups III VI), for example of elements from group 13… …   Wikipedia

  • Coating — is a covering that is applied to the surface of an object, usually referred to as the substrate. In many cases coatings are applied to improve surface properties of the substrate, such as appearance, adhesion, wetability, corrosion resistance,… …   Wikipedia

  • List of coating techniques — This list contains an overview of coating techniques for thin film deposition, found in the field of materials science. The techniques can be classified as follows: Chemical vapor deposition (CVD) * Metalorganic vapour phase epitaxy *… …   Wikipedia

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